A review of plasma-assisted deposition methods for amorphous carbon thin and ultrathin films with a focus on the cathodic vacuum arc technique
Source abstract
Abstract
Amorphous carbon (a-C) films have garnered significant attention over the past few decades, principally due to their remarkable thermophysical properties, strong adherence to various materials, and good chemical inertness. These intrinsic characteristics of a-C films have led to their use as protective overcoats in numerous applications, such as hard-disk drives, microelectromechanical systems, and biomedical implants. The significant thinning of a-C films to a few nanometers, dictated by rapid advances in device miniaturization and compactness, motivated the development of thin-film deposition methods that preserve important film attributes like uniformity, strength, and structural stability. This article provides a comprehensive assessment of the most effective deposition techniques for synthesizing ultrathin films, particularly a-C films due to their wide application range as protective overcoats in contemporary technologies, state-of-the-art microanalysis methods for ultrathin films, and the technology challenges that must be overcome for CVA to capture a bigger share of the thin-film technology marketplace. Graphical abstract: [Figure not available: see fulltext.]
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Research context
OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Semiconductor materials and devices
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References (100+)
Show source-provided references
1. I.G. Brown, Cathodic arc deposition of films. Annu. Rev. Mater. Sci. 28, 243 (1998)10.1146/annurev.matsci.28.1.243 ↗
2. J. Robertson, Ultrathin carbon coatings for magnetic storage technology. Thin Solid Films 383, 81 (2001)10.1016/S0040-6090(00)01786-7 ↗
3. M.K. Fung, K.H. Lai, C.Y. Chan, I. Bello, C.S. Lee, S.T. Lee, D.S. Mao, X. Wang, Mechanical properties and corrosion studies of amorphous carbon on magnetic disks prepared by ECR plasma technique. Thin Solid Films 368, 198 (2000)10.1016/S0040-6090(00)00764-1 ↗
4. R. Hauert, An overview on the tribological behavior of diamond-like carbon in technical and medical applications. Tribol. Int. 37, 991 (2004)10.1016/j.triboint.2004.07.017 ↗
5. A. Erdemir, C. Donnet, Tribology of diamond-like carbon films: recent progress and future prospects. J. Phys. D 39, R311 (2006)10.1088/0022-3727/39/18/R01 ↗
6. C.S. Bhatia, S. Anders, I.G. Brown, K. Bobb, R. Hsiao, D.B. Bogy, Ultra-thin overcoats for the head/disk interface tribology. ASME J. Tribol. 120, 795 (1998)10.1115/1.2833781 ↗
7. T. Xu, L. Pruitt, Diamond-like carbon coatings for orthopaedic applications: an evaluation of tribological performance. J. Mater. Sci. 10, 83 (1999)
8. A. Grill, Tribology of diamondlike carbon and related materials: an updated review. Surf. Coat. Technol. 94–95, 507 (1997)10.1016/S0257-8972(97)00458-1 ↗
9. B. Bhushan, Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: recent developments. Diam. Relat. Mater. 8, 1985 (1999)10.1016/S0925-9635(99)00158-2 ↗
10. D.R. McKenzie, D. Muller, B.A. Pailthorpe, Compressive-stress-induced formation of thin-film tetrahedral amorphous carbon. Phys. Rev. Lett. 67, 773 (1991)10.1103/PhysRevLett.67.773 ↗
11. P.H. Gaskell, A. Saeed, P. Chieux, D.R. McKenzie, Neutron-scattering studies of the structure of highly tetrahedral amorphous diamondlike carbon. Phys. Rev. Lett. 67, 1286 (1991)10.1103/PhysRevLett.67.1286 ↗
12. J.C. Angus, C.C. Hayman, Low-pressure, metastable growth of diamond and “diamondlike” phases. Science 241, 913 (1988)10.1126/science.241.4868.913 ↗
13. A. Grill, B.S. Meyerson, Development and status of diamondlike carbon, in Synthetic Diamond-Emerging CVD Science and Technology, ed. by K.E. Spear, J.P. Dismukes (Wiley, New York, 1994), pp.91–146
14. H.-S. Zhang, K. Komvopoulos, Surface modification of magnetic recording media by filtered cathodic vacuum arc. J. Appl. Phys. 106, 093504 (2009)10.1063/1.3245399 ↗
15. J. Ishikawa, Y. Takeiri, K. Ogawa, T. Takagi, Transparent carbon film prepared by mass-separated negative-carbon-ion-beam deposition. J. Appl. Phys. 61, 2509 (1987)10.1063/1.337925 ↗
16. W. Lu, K. Komvopoulos, Dependence of growth and nanomechanical properties of ultrathin amorphous carbon films on radio frequency sputtering conditions. J. Appl. Phys. 86, 2268 (1999)10.1063/1.371041 ↗
17. S. Xu, B.K. Tay, H.S. Tan, L. Zhong, Y.Q. Tu, S.R.P. Silva, W.I. Milne, Properties of carbon ion deposited tetrahedral amorphous carbon films as a function of ion energy. J. Appl. Phys. 79, 7234 (1996)10.1063/1.361440 ↗
18. A.A. Voevodin, M.S. Donley, Preparation of amorphous diamond-like carbon by pulsed laser deposition: a critical review. Surf. Coat. Technol. 82, 199 (1996)10.1016/0257-8972(95)02734-3 ↗
19. W. Lu, K. Komvopoulos, Nanotribological and nanomechanical properties of ultrathin amorphous carbon films synthesized by radio frequency sputtering. ASME J. Tribol. 123, 641 (2001)10.1115/1.1339977 ↗
20. A. Anders, Physics of plasma-based ion implantation & deposition (PBIID) and high power impulse magnetron sputtering (HIPIMS): a comparison. Phys. Status Solidi A 205, 965 (2008)10.1002/pssa.200778311 ↗
21. S. Anders, I.G. Brown, C.S. Bhatia, D.B. Bogy, Cathodic arc deposited diamond-like carbon films for head-disk tribology applications. Data Storage 4, 31 (1997)
22. A. Anders, Energetic deposition using filtered cathodic arc plasmas. Vacuum 67, 673 (2002)10.1016/S0042-207X(02)00260-9 ↗
23. A.H. Lettington, Applications of diamond-like carbon thin films, in Thin Film Diamond, ed. by A.H. Lettington, J.W. Steeds (Springer, Dordrecht, 1994), pp.117–12610.1007/978-94-011-0725-9_10 ↗
24. T.S. Santra, T.K. Bhattacharyya, P. Patel, F.G. Tseng, T.K. Barik, Diamond, diamond-like carbon (DLC) and diamond-like nanocomposite (DLN) thin films for MEMS applications, in Microelectromechanical Systems and Devices, ed. by N. Islam (In Tech, Rijeka, 2012), pp.459–480
25. A. Grill, Diamond-like carbon coatings as biocompatible materials—an overview. Diam. Relat. Mater. 12, 166 (2003)10.1016/S0925-9635(03)00018-9 ↗
26. V. Mehta, J.S. Cooper, Review and analysis of PEM fuel cell design and manufacturing. J. Power Sources 114, 32 (2003)10.1016/S0378-7753(02)00542-6 ↗
27. J.Y. Sze, B.K. Tay, Carbon ion implantation of ultra-high molecular weight polyethylene using filtered cathodic vacuum arc with substrate pulse biasing. Surf. Coat. Technol. 200, 4104 (2006)10.1016/j.surfcoat.2005.04.001 ↗
28. D.P. Dowling, P.V. Kola, K. Donnelly, T.C. Kelly, K. Brumitt, L. Lloyd, R. Eloy, M. Therin, N. Weill, Evaluation of diamond-like carbon-coated orthopaedic implants. Diam. Relat. Mater. 6, 390 (1997)10.1016/S0925-9635(96)00687-5 ↗
29. H. Tsai, D.B. Bogy, Characterization of diamondlike carbon films and their application as overcoats on thin-film media for magnetic recording. J. Vac. Sci. Technol. A 5, 3287 (1987)10.1116/1.574188 ↗
30. C. Casiraghi, J. Robertson, A.C. Ferrari, Diamond-like carbon for data and beer storage. Mater. Today 10, 44 (2007)10.1016/S1369-7021(06)71791-6 ↗
31. E.M. Moser, R. Urech, E. Hack, H. Künzli, E. Müller, Hydrocarbon films inhibit oxygen permeation through plastic packaging material. Thin Solid Films 317, 388 (1998)10.1016/S0040-6090(97)00555-5 ↗
32. M.H. Kryder, E.C. Gage, T.W. McDaniel, W.A. Challener, R.E. Rottmayer, G. Ju, Y.-T. Hsia, M.F. Erden, Heat assisted magnetic recording. Proc. IEEE 96, 1810 (2008)10.1109/JPROC.2008.2004315 ↗
33. L.K. Cheah, X. Shi, E. Liu, J.R. Shi, Nitrogenated tetrahedral amorphous carbon films prepared by ion-beam-assisted filtered cathodic vacuum arc technique for solar cells application. Appl. Phys. Lett. 73, 2473 (1998)10.1063/1.122486 ↗
34. J.K. Luo, Y.Q. Fu, H.R. Le, J.A. Williams, S.M. Spearing, W.I. Milne, Diamond and diamond-like carbon MEMS. J. Micromech. Microeng. 17, S147 (2007)10.1088/0960-1317/17/7/S12 ↗
35. Y. Wu, H. Li, L. Ji, Y. Ye, J. Chen, H. Zhou, Preparation and properties of MoS2/a-C films for space tribology. J. Phys. D 46, 425301 (2013)10.1088/0022-3727/46/42/425301 ↗
36. K. Komvopoulos, Surface engineering and microtribology for microelectromechanical systems. Wear 200, 305 (1996)10.1016/S0043-1648(96)07328-0 ↗
37. K. Komvopoulos, Adhesion and friction forces in microelectromechanical systems: mechanisms, measurement, surface modification techniques, and adhesion theory. J. Adhes. Sci. Technol. 17, 477 (2003)10.1163/15685610360554384 ↗
38. S.R.P. Silva, Properties of Amorphous Carbon (INSPEC, London, 2003)
39. J. Robertson, Requirements of ultrathin carbon coatings for magnetic storage technology. Tribol. Int. 36, 405 (2003)10.1016/S0301-679X(02)00216-5 ↗
40. P.R. Goglia, J. Berkowitz, J. Hoehn, A. Xidis, L. Stover, Diamond-like carbon applications in high density hard disc recording heads. Diam. Relat. Mater. 10, 271 (2001)10.1016/S0925-9635(00)00589-6 ↗
41. N. Wang, K. Komvopoulos, The multilayered structure of ultrathin amorphous carbon films synthesized by filtered cathodic vacuum arc deposition. J. Mater. Res. 28, 2124 (2013)10.1557/jmr.2013.206 ↗
42. C.A. Davis, G.A.J. Amaratunga, K.M. Knowles, Growth mechanism and cross-sectional structure of tetrahedral amorphous carbon thin films. Phys. Rev. Lett. 80, 3280 (1998)10.1103/PhysRevLett.80.3280 ↗
43. C.A. Davis, K.M. Knowles, G.A.J. Amaratunga, Cross-sectional structure of tetrahedral amorphous carbon thin films. Surf. Coat. Technol. 76–77, 316 (1995)10.1016/0257-8972(95)02553-7 ↗
44. M.P. Siegal, P.N. Provencio, D.R. Tallant, R.L. Simpson, B. Kleinsorge, W.I. Milne, Bonding topologies in diamondlike amorphous-carbon films. Appl. Phys. Lett. 76, 2047 (2000)10.1063/1.126250 ↗
45. J. Robertson, Diamond-like amorphous carbon. Mater. Sci. Eng. R 37, 129 (2002)10.1016/S0927-796X(02)00005-0 ↗
46. R.L. Wallace Jr., The reproduction of magnetically recorded signals. Bell Syst. Tech. J. 30, 1145 (1951)10.1002/j.1538-7305.1951.tb03699.x ↗
47. R. Wood, Future hard disk drive systems. J. Magn. Magn. Mater. 321, 555 (2009)10.1016/j.jmmm.2008.07.027 ↗
48. Z.Z. Bandić, R.H. Victora, Advances in magnetic data storage technologies. Proc. IEEE 96, 1749 (2008)10.1109/JPROC.2008.2004308 ↗
49. Z.-M. Yuan, B. Liu, T. Zhou, C.K. Goh, C.L. Ong, C.M. Cheong, L. Wang, Perspectives of magnetic recording system at 10 Tb/in2. IEEE Trans. Magn. 45, 5038 (2009)10.1109/TMAG.2009.2029599 ↗
50. X. Wang, K. Gao, H. Zhou, A. Itagi, M. Seigler, E. Gage, HAMR recording limitations and extendibility. IEEE Trans. Magn. 49, 686 (2013)10.1109/TMAG.2012.2221689 ↗
51. N. Yasui, H. Inaba, K. Furusawa, M. Saito, N. Ohtake, Characterization of head overcoat for 1 Tb/in2 magnetic recording. IEEE Trans. Magn. 45, 805 (2009)10.1109/TMAG.2008.2010636 ↗
52. J. Xie, K. Komvopoulos, The role of duty cycle of substrate pulse biasing in filtered cathodic vacuum arc deposition of amorphous carbon films. IEEE Trans. Magn. 51, 3302009 (2015)10.1109/TMAG.2015.2464380 ↗
53. J. Matlak, K. Komvopoulos, Ultrathin amorphous carbon films synthesized by filtered cathodic vacuum arc used as protective overcoats of heat-assisted magnetic recording heads. Sci. Rep. 8, 9647 (2018)10.1038/s41598-018-27528-5 ↗
54. H.-S. Zhang, K. Komvopoulos, Direct-current cathodic vacuum arc system with magnetic-field mechanism for plasma stabilization. Rev. Sci. Instrum. 79, 073905 (2008)10.1063/1.2949128 ↗
55. A. Anders, Cathodic arc sources, in Cathodic Arcs, Springer Series on Atomic, Optical, and Plasma Physics, vol. 50 (Springer, New York, 2008), pp.299–36210.1007/978-0-387-79108-1_7 ↗
56. N. Pasaja, S. Sansongsiri, S. Intarasiri, T. Vilaithong, A. Anders, Mo-containing tetrahedral amorphous carbon deposited by dual filtered cathodic vacuum arc with selective pulsed bias voltage. Nucl. Instrum. Meth. Phys. Res. B 259, 867 (2007)10.1016/j.nimb.2007.02.093 ↗
57. S. Sansongsiri, A. Anders, B. Yotsombat, Electrical properties of a-C: Mo films produced by dual-cathode filtered cathodic arc plasma deposition. Diam. Relat. Mater. 17, 2080 (2008)10.1016/j.diamond.2008.07.006 ↗
58. J.L. Endrino, D. Horwat, A. Anders, J. Andersson, R. Gago, Impact of annealing on the conductivity of amorphous carbon films incorporating copper and gold nanoparticles deposited by pulsed dual cathodic arc. Plasma Process. Polym. 6, S438 (2009)10.1002/ppap.200931003 ↗
59. J.L. Endrino, R. Escobar Galindo, H.-S. Zhang, M. Allen, R. Gago, A. Espinosa, A. Anders, Structure and properties of silver-containing a-C(H) films deposited by plasma immersion ion implantation. Surf. Coat. Technol. 202, 3675 (2008)10.1016/j.surfcoat.2008.01.011 ↗
60. A. Anders, N. Pasaja, S. Sansongsiri, Filtered cathodic arc deposition with ion-species-selective bias. Rev. Sci. Instrum. 78, 063901 (2007)10.1063/1.2745229 ↗
61. J.L. Endrino, D. Horwat, R. Gago, J. Andersson, Y.S. Liu, J. Guo, A. Anders, Electronic structure and conductivity of nanocomposite metal (Au, Ag, Cu, Mo)-containing amorphous carbon films. Solid State Sci. 11, 1742 (2009)10.1016/j.solidstatesciences.2008.08.007 ↗
62. O.R. Monteiro, M.-P. Delplancke-Ogletree, I.G. Brown, Tungsten-containing amorphous carbon films deposited by pulsed vacuum arc. Thin Solid Films 342, 100 (1999)10.1016/S0040-6090(98)01441-2 ↗
63. O.R. Monteiro, M.-P. Delplancke-Ogletree, R.Y. Lo, R. Winand, I. Brown, Synthesis and characterization of thin films of WCx produced by mixing W and C plasma streams. Surf. Coat. Technol. 94–95, 220 (1997)10.1016/S0257-8972(97)00453-2 ↗
64. H.-S. Zhang, K. Komvopoulos, Synthesis of ultrathin carbon films by direct current filtered cathodic vacuum arc. J. Appl. Phys. 105, 083305 (2009)10.1063/1.3098254 ↗
65. J. Koskinen, A. Anttila, J.-P. Hirvonen, Diamond-like carbon coatings by arc-discharge methods. Surf. Coat. Technol. 47, 180 (1991)10.1016/0257-8972(91)90280-A ↗
66. S. Anders, A. Anders, I. Brown, Macroparticle-free thin films produced by an efficient vacuum arc deposition technique. J. Appl. Phys. 74, 4239 (1993)10.1063/1.354431 ↗
67. V.S. Veerasamy, G.A.J. Amaratunga, W.I. Milne, P. Hewitt, P.J. Fallon, D.R. McKenzie, C.A. Davis, Optical and electronic properties of amorphous diamond. Diam. Relat. Mater. 2, 782 (1993)10.1016/0925-9635(93)90223-O ↗
68. I.I. Aksenov, V.A. Belous, V.G. Padalka, V.M. Khoroshikh, Apparatus to rid the plasma of a vacuum arc of macroparticles. Instrum. Exp. Tech. 21, 1416 (1978)
69. M.M.M. Bilek, A. Anders, Designing advanced filters for macroparticle removal from cathodic arc plasmas. Plasma Sources Sci. Technol. 8, 488 (1999)10.1088/0963-0252/8/3/319 ↗
70. A. Anders, W. Fong, A.V. Kulkarni, F.W. Ryan, C.S. Bhatia, Ultrathin diamond-like carbon films deposited by filtered carbon vacuum arcs. IEEE Trans. Plasma Sci. 29, 768 (2001)10.1109/27.964472 ↗
71. D.A. Baldwin, S. Falabella, Deposition processes utilizing a new filtered cathodic arc source. Proc. 38th Soc. Vacuum Coaters Technol., Society of Vacuum Coaters, Albuquerque, NM, pp. 309–316, 1995
72. S. Anders, A. Anders, M.R. Dickinson, R.A. MacGill, I.G. Brown, S-shaped magnetic macroparticle filter for cathodic arc deposition. IEEE Trans. Plasma Sci. 25, 670 (1997)10.1109/27.640683 ↗
73. T. Witke, T. Schuelke, B. Schultrich, P. Siemroth, J. Vetter, Comparison of filtered high-current pulsed arc deposition (φ-HCA) with conventional vacuum arc methods. Surf. Coat. Technol. 126, 81 (2000)10.1016/S0257-8972(00)00544-2 ↗
74. R.P. Welty, Rectangular vacuum-arc plasma source. U. S. Patent 5,480,527 (1996)
75. V.I. Gorokhovsky, Apparatus for application of coatings in vacuum. U. S. Patent 5,435,900 (1995)
76. X. Shi, B.K. Tay, H.S. Tan, E. Liu, J. Shi, L.K. Cheah, X. Jin, Transport of vacuum arc plasma through an off-plane double bend filtering duct. Thin Solid Films 345, 1 (1999)10.1016/S0040-6090(99)00095-4 ↗
77. X. Shi, B.K. Tay, S.P. Lau, The double bend filtered cathodic arc technology and its applications. Int. J. Mod. Phys. B 14, 136 (2000)10.1142/S0217979200000145 ↗
78. T. Witke, P. Siemroth, Deposition of droplet-free films by vacuum arc evaporation - results and applications. IEEE Proc. 18th Int. Symp. on Discharges and Electrical Insulation in Vacuum, Eindhoven, The Netherlands, pp. 605–608, 199810.1109/DEIV.1998.738784 ↗
79. J. Wei, H. Li, L. Liu, P. Guo, P. Ke, A. Wang, Enhanced tribological and corrosion properties of multilayer ta-C films via alternating sp3 content. Surf. Coat. Technol. 374, 317 (2019)10.1016/j.surfcoat.2019.05.087 ↗
80. A. Anders, Approaches to rid cathodic arc plasmas of macro- and nanoparticles: a review. Surf. Coat. Technol. 120–121, 319 (1999)10.1016/S0257-8972(99)00460-0 ↗
81. J. Matlak, E. Rismaniyazdi, K. Komvopoulos, Nanostructure, structural stability, and diffusion characteristics of layered coatings for heat-assisted magnetic recording head media. Sci. Rep. 8, 9807 (2018)10.1038/s41598-018-27688-4 ↗
82. S. Wang, A. Roy, K. Komvopoulos, Thermal stability and diffusion characteristics of ultrathin amorphous carbon films grown on crystalline and nitrogenated silicon substrates by filtered cathodic vacuum arc deposition. Sci. Rep. 11, 13106 (2021)10.1038/s41598-021-91903-y ↗
83. X. Chen, Z. Peng, X. Yu, Z. Fu, W. Yue, C. Wang, Microstructure and tribological performance of self-lubricating diamond/tetrahedral amorphous carbon composite film. Appl. Surf. Sci. 257, 3180 (2011)10.1016/j.apsusc.2010.10.136 ↗
84. D. Sheeja, B.K. Tay, C.Q. Sun, Y.Q. Fu, Characterization of Ti-containing amorphous carbon films prepared on titanium substrates. J. Mater. Sci. 38, 421 (2003)10.1023/A:1021807312324 ↗
85. S. Logothetidis, C. Charitidis, P. Patsalas, Engineering properties of fully sp3- to sp2-bonded carbon films and their modifications after post-growth ion irradiation. Diam. Relat. Mater. 11, 1095 (2002)10.1016/S0925-9635(01)00575-1 ↗
86. X. Ding, Y.J. Li, Z. Sun, B.K. Tay, S.P. Lau, G.Y. Chen, W. Cheung, S. Wong, Electron field emission from Ti-containing tetrahedral amorphous carbon films deposited by filtered cathodic vacuum arc. J. Appl. Phys. 88, 6842 (2000)10.1063/1.1323541 ↗
87. H. Pan, M. Pruski, B.C. Gerstein, F. Li, J.S. Lannin, Local coordination of carbon atoms in amorphous carbon. Phys. Rev. B 44, 6741 (1991)10.1103/PhysRevB.44.6741 ↗
88. S. Kaplan, F. Jansen, M. Machonkin, Characterization of amorphous carbon-hydrogen films by solid-state nuclear magnetic resonance. Appl. Phys. Lett. 47, 750 (1985)10.1063/1.96027 ↗
89. M.A. Tamor, W.C. Vassell, K.R. Carduner, Atomic constraint in hydrogenated “diamond-like” carbon. Appl. Phys. Lett. 58, 592 (1991)10.1063/1.104597 ↗
90. A.C. Ferrari, A. Libassi, B.K. Tanner, V. Stolojan, J. Yuan, L.M. Brown, S.E. Rodil, B. Kleinsorge, J. Robertson, Density, sp3 fraction, and cross-sectional structure of amorphous carbon films determined by x-ray reflectivity and electron energy-loss spectroscopy. Phys. Rev. B 62, 11089 (2000)10.1103/PhysRevB.62.11089 ↗
91. C.A. Lucas, T.D. Nguyen, J.B. Kortright, X-ray reflectivity measurements of the expansion of carbon films upon annealing. Appl. Phys. Lett. 59, 2100 (1991)10.1063/1.106093 ↗
92. Q. Zhang, S.F. Yoon, Rusli, J. Ahn, H. Yang, D. Bahr, Deposition of hydrogenated diamond-like carbon films under the impact of energetic hydrocarbon ions. J. Appl. Phys. 84, 5538 (1998)10.1063/1.368599 ↗
93. R.P. Vidano, D.B. Fischbach, L.J. Willis, T.M. Loehr, Observation of Raman band shifting with excitation wavelength for carbons and graphites. Solid State Commun. 39, 341 (1981)10.1016/0038-1098(81)90686-4 ↗
94. D.S. Knight, W.B. White, Characterization of diamond films by Raman spectroscopy. J. Mater. Res. 4, 385 (1989)10.1557/JMR.1989.0385 ↗
95. B.S. Elman, M. Shayegan, M.S. Dresselhaus, H. Mazurek, G. Dresselhaus, Structural characterization of ion-implanted graphite. Phys. Rev. B 25, 4142 (1982)10.1103/PhysRevB.25.4142 ↗
96. R. Haerle, E. Riedo, A. Pasquarello, A. Baldereschi, sp2/sp3 hybridization ratio in amorphous carbon from C 1s core-level shifts: X-ray photoelectron spectroscopy and first-principles calculation. Phys. Rev. B 65, 045101 (2001)10.1103/PhysRevB.65.045101 ↗
97. N. Wang, K. Komvopoulos, Incidence angle effect of energetic carbon ions on deposition rate, topography, and structure of ultrathin amorphous carbon films deposited by filtered cathodic vacuum arc. IEEE Trans. Magn. 48, 2220 (2012)10.1109/TMAG.2012.2190295 ↗
98. J. Xie, K. Komvopoulos, The effect of Argon ion irradiation on the thickness and structure of ultrathin amorphous carbon films. J. Appl. Phys. 119, 095304 (2016)10.1063/1.4942440 ↗
99. N. Wang, K. Komvopoulos, The effect of deposition energy of energetic atoms on the growth and structure of ultrathin amorphous carbon films studied by molecular dynamics simulations. J. Phys. D 47, 245303 (2014)10.1088/0022-3727/47/24/245303 ↗
100. J. Matlak, K. Komvopoulos, Friction properties of amorphous carbon ultrathin films deposited by filtered cathodic vacuum arc and radio-frequency sputtering. Thin Solid Films 579, 167 (2015)10.1016/j.tsf.2014.12.043 ↗