journal article·2013-07-28

Optimization of PbTiO₃ seed layers and Pt metallization for PZT-based piezoMEMS actuators

Luz M. Sanchez, Daniel M. Potrepka, Glen R. Fox, Ichiro Takeuchi, Ke Wang, Leonid A. Bendersky, Ronald G. Polcawich

Journal of Materials Research· Volume 28· Issue 14

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Source: crossref · Quality: short

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OpenAlex topics: Ferroelectric and Piezoelectric Materials · Acoustic Wave Resonator Technologies · Electronic and Structural Properties of Oxides

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References (36)

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1. 10.1080/0015019021150610.1080/00150190211506 ↗

2. 34. Chu F. and Fox G. : Method for manufacturing a ferroelectric memory cell including co-annealing. U.S. Patent 6 376 259, April 23, 2002.

3. 10.1016/0040-6090(93)90540-610.1016/0040-6090(93)90540-6 ↗

4. 10.1063/1.10435110.1063/1.104351 ↗

5. 10.1109/JMEMS.2008.92717710.1109/JMEMS.2008.927177 ↗

6. 24. Trolier-McKinstry S. : Private Communication, 2008.

7. 10.1557/JMR.1995.204210.1557/JMR.1995.2042 ↗

8. Potrepka · 2011 · 1299

9. 10.1111/j.1551-2916.2010.04309.x10.1111/j.1551-2916.2010.04309.x ↗

10. 10.1002/aenm.20129001910.1002/aenm.201290019 ↗

11. 10.1016/j.nanoen.2012.09.00110.1016/j.nanoen.2012.09.001 ↗

12. 10.1002/adfm.20110307710.1002/adfm.201103077 ↗

13. 10.1109/MEMSYS.2009.480556610.1109/MEMSYS.2009.4805566 ↗

14. 10.1126/science.120718610.1126/science.1207186 ↗

15. 2. Leroy S. : Top 30 MEMS Companies 2010. Yole Developpment, 2011.

16. 10.1063/1.172174110.1063/1.1721741 ↗

17. 10.1103/PhysRevLett.74.384810.1103/PhysRevLett.74.3848 ↗

18. 10.1016/S0167-577X(00)00408-010.1016/S0167-577X(00)00408-0 ↗

19. 10.1016/S0924-4247(03)00090-610.1016/S0924-4247(03)00090-6 ↗

20. Sol-gel processing of PbTiO3, PbZrO3, PZT, and PLZT thin films

21. 10.1080/71371831510.1080/713718315 ↗

22. 10.1023/B:JECR.0000033998.72845.5110.1023/B:JECR.0000033998.72845.51 ↗

23. 10.1007/978-0-387-47318-5_510.1007/978-0-387-47318-5_5 ↗

24. 10.1063/1.358119010.1063/1.3581190 ↗

25. 10.1007/s10853-011-5642-110.1007/s10853-011-5642-1 ↗

26. 10.1016/j.apsusc.2004.05.00410.1016/j.apsusc.2004.05.004 ↗

27. 8. Takahashi Y. and Suzuki M. : Piezoelectric ink jet printer head. U.S. Patent 5 266 964, November 30, 1993.

28. 10.1111/j.1551-2916.2011.04803.x10.1111/j.1551-2916.2011.04803.x ↗

29. Ross · 2007

30. 10.1088/0034-4885/61/9/00210.1088/0034-4885/61/9/002 ↗

31. 10.1016/j.apsusc.2004.06.12010.1016/j.apsusc.2004.06.120 ↗

32. Zhou · 2000 · 655 · 1171

33. 10.1063/1.36661410.1063/1.366614 ↗

34. 26. Sanchez L. and Polcawich R.G. : Optimization of PbTiO3 seed layers for PZT MEMS actuators. Technical Report ADA492053, (National Technical Information Service, 2008).10.21236/ADA492053 ↗

35. 10.1109/JMEMS.2011.214816010.1109/JMEMS.2011.2148160 ↗

36. 10.1109/TMTT.2007.91007210.1109/TMTT.2007.910072 ↗