journal article·2000-11

Surface stress model for intrinsic stresses in thin films

R. C. Cammarata, T. M. Trimble, D. J. Srolovitz

Journal of Materials Research· Volume 15· Issue 11
Publisher page

Abstract

A simple model was presented for intrinsic stress generation in thin films resulting from surface stress effects. This mechanism can explain the origin of compressive stresses often observed during island growth prior to coalescence, as well as intrinsic compressive stresses reported for certain continuous, fully grown films. In some cases, surface stress effects may contribute to a sudden change in the intrinsic stress during island coalescence.
Source: crossref · Quality: baseline

Research context

OpenAlex topics: Copper Interconnects and Reliability · Metal and Thin Film Mechanics · Semiconductor materials and devices

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (44)

Show source-provided references
1. 10.1016/0040-6090(85)90095-110.1016/0040-6090(85)90095-1 ↗
2. 10.1088/0953-8984/1/41/00610.1088/0953-8984/1/41/006 ↗
3. 10.1080/0141861870820448510.1080/01418618708204485 ↗
4. Ohring · 1992
5. Frederiske · 1972
6. 10.1063/1.11417710.1063/1.114177 ↗
7. 10.1016/0042-207X(90)93933-A10.1016/0042-207X(90)93933-A ↗
8. Hoffman · Phys. Thin Films · 1966 · 3 · 211
9. Ruud · 1991 · 209 · 737
10. 10.1088/0953-8984/6/45/00510.1088/0953-8984/6/45/005 ↗
11. 10.1016/0079-6816(94)90005-110.1016/0079-6816(94)90005-1 ↗
12. 10.1016/0001-6160(80)90002-410.1016/0001-6160(80)90002-4 ↗
13. 10.1116/1.131570210.1116/1.1315702 ↗
14. 10.1016/0040-6090(90)90145-410.1016/0040-6090(90)90145-4 ↗
15. 10.1016/0040-6090(72)90387-210.1016/0040-6090(72)90387-2 ↗
16. Abermann · 1992 · 308 · 25
17. Hertzberg · 1996 · 315
18. 10.1016/0040-6090(78)90140-210.1016/0040-6090(78)90140-2 ↗
19. 10.1016/0001-6160(82)90043-810.1016/0001-6160(82)90043-8 ↗
20. 10.1080/1040843880824373410.1080/10408438808243734 ↗
21. 10.1098/rspa.1955.006410.1098/rspa.1955.0064 ↗
22. 10.1116/1.131667410.1116/1.1316674 ↗
23. Campbell · 1970 · 123
24. Schweitz · 1998 · 505 · 559
25. 10.1063/1.35469210.1063/1.354692 ↗
26. 10.1063/1.36370110.1063/1.363701 ↗
27. 10.1063/1.37200110.1063/1.372001 ↗
28. 10.1103/PhysRevB.42.1093310.1103/PhysRevB.42.10933 ↗
29. Hoffman · 1976 · 14 · 273
30. 10.1016/0040-6090(78)90106-210.1016/0040-6090(78)90106-2 ↗
31. 10.1016/0040-6090(72)90396-310.1016/0040-6090(72)90396-3 ↗
32. 10.1557/JMR.1999.046810.1557/JMR.1999.0468 ↗
33. 10.1149/1.241144110.1149/1.2411441 ↗
34. 10.1016/0040-6090(95)00603-610.1016/0040-6090(95)00603-6 ↗
35. 10.1016/0042-207X(81)90007-510.1016/0042-207X(81)90007-5 ↗
36. 10.1016/S1359-6454(99)00286-410.1016/S1359-6454(99)00286-4 ↗
37. 10.1016/0039-6028(68)90119-210.1016/0039-6028(68)90119-2 ↗
38. 10.1016/0039-6028(70)90031-210.1016/0039-6028(70)90031-2 ↗
39. 10.1016/0039-6028(72)90127-610.1016/0039-6028(72)90127-6 ↗
40. 10.1103/PhysRevB.43.882910.1103/PhysRevB.43.8829 ↗
41. 10.1103/PhysRevB.44.393410.1103/PhysRevB.44.3934 ↗
42. Brooks · 1963 · 20
43. 10.1016/0965-9773(95)00043-710.1016/0965-9773(95)00043-7 ↗
44. 10.1557/JMR.1999.059010.1557/JMR.1999.0590 ↗