Crystallite coalescence: A mechanism for intrinsic tensile stresses in thin films
Source abstract
Abstract
We examined the stress associated with crystallite coalescence during the initial stages of growth in thin polycrystalline films with island growth morphology. As growing crystallites contacted each other at their bases, the side-walls zipped together until a balance was reached between the energy associated with eliminating surface area, creating a grain boundary and straining the film. Our estimate for the resulting strain depends only on interfacial free energies, elastic properties, and grain size and predicts large tensile stresses in agreement with experimental results. We also discuss possible stress relaxation mechanisms that can occur during film growth subsequent to the coalescence event.
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Research context
OpenAlex topics: Adhesion, Friction, and Surface Interactions · Metal and Thin Film Mechanics · Copper Interconnects and Reliability
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (30)
Show source-provided references
1. Ramaswamy · 1998 · 161
2. Ramaswamy · 1998 · 589
3. 10.1063/1.36370110.1063/1.363701 ↗
4. Chiu · Int. J. Solids and Structures · 1993 · 30 · 298310.1016/0020-7683(93)90208-O ↗
5. 10.1016/0042-207X(90)93933-A10.1016/0042-207X(90)93933-A ↗
6. 10.1063/1.34931310.1063/1.349313 ↗
7. 10.1016/0040-6090(90)90145-410.1016/0040-6090(90)90145-4 ↗
8. 10.1016/0040-6090(85)90096-310.1016/0040-6090(85)90096-3 ↗
9. 10.1080/0141861990821030310.1080/01418619908210303 ↗
10. 10.1016/0040-6090(78)90140-210.1016/0040-6090(78)90140-2 ↗
11. 10.1063/1.36299610.1063/1.362996 ↗
12. 10.1063/1.32225010.1063/1.322250 ↗
13. 10.1016/0040-6090(72)90396-310.1016/0040-6090(72)90396-3 ↗
14. 10.1016/0040-6090(76)90453-310.1016/0040-6090(76)90453-3 ↗
15. 10.1080/1040843920824458610.1080/10408439208244586 ↗
16. 10.1080/1040843880824373410.1080/10408438808243734 ↗
17. 10.1002/sia.74003011310.1002/sia.740030113 ↗
18. Ueda · 1995 · 382 · 279
19. 10.1016/0040-6090(86)90265-810.1016/0040-6090(86)90265-8 ↗
20. 10.1116/1.131626810.1116/1.1316268 ↗
21. 10.1016/0040-6090(82)90447-310.1016/0040-6090(82)90447-3 ↗
22. 30. Frans Spaepen (private communication).
23. 10.1063/1.35448510.1063/1.354485 ↗
24. 10.1063/1.170241610.1063/1.1702416 ↗
25. 10.1063/1.34870110.1063/1.348701 ↗
26. Abermann · 1992 · 239 · 213
27. 10.1116/1.56896410.1116/1.568964 ↗
28. 10.1116/1.131795110.1116/1.1317951 ↗
29. Hoffman · 1966 · 3
30. Koch · J. Phys.: Condens. Matter · 1994 · 17 · 9519