article·2026-06-27

Fenton reaction-assisted chemical mechanical polishing of SiC wafer using gel disc with Al₂O₃‑SiO₂ core‑shell abrasives

Lanxing Xu, Mingfeng Ke, Liang Zhao, Kaiping Feng, Yi-Xiang Wang, Tianchen Zhao, Binghai Lyu

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OpenAlex topics: Advanced Surface Polishing Techniques · Diamond and Carbon-based Materials Research · Advanced machining processes and optimization

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