Effect of the Si/Ti Ratio on the Structure and Mechanical Properties of Plasma-Enhanced Magnetron Sputtered TiSiCN Coatings
Source abstract
Abstract
Different Si/Ti ratios of TiSiCN composite coatings were prepared by using the plasma-enhanced magnetron sputtering (PEMS) technology with a buffer layer of Cr. The influence of Si/Ti ratio on the morphology, composition, microstructure, mechanical and tribological properties of the coatings were investigated by scanning electron microscope, x-ray photoelectron spectroscopy, x-ray diffraction, Raman spectroscopy, nanoindentation and tribometer. The results show the composite coatings mainly consisted of graphite, TiCN, CNx nanocrystals and amorphous Si3N4. TiSiCN composite coating possesses the highest hardness at the Si/Ti ratio of 19/3 due to the increase in amorphous hardening phase, sp3-C hybridized bonding and the grain refinement. Self-lubrication of graphite and amorphous Si3N4 hardening phase significantly reduces the wear rate of the coating. The TiSiCN composite coating with Si/Ti ratio of 3/4 presents the lowest coefficient of friction and wear rate.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · Tribology and Wear Analysis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
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