journal article·2020-11

Effects of Varying Power and Argon Gas Flux on Tribological Properties and High-Speed Drilling Performance of Diamond-Like Carbon Coatings Deposited using High-Power Impulse Magnetron Sputtering System

Wen Hsien Kao, Yean Liang Su, Min Yu Shih

Publisher page

Abstract

This study examines the effects of different pulse powers and gas fluxes on the mechanical and tribological properties and high-speed drilling performance of diamond-like carbon coatings deposited on tungsten carbide substrates by high-power impulse magnetron sputtering. It is shown that an appropriate pulse power is essential in improving the mechanical and tribological properties of the coatings. Specifically, coatings deposited with a pulse power of 5 kW possess a high hardness and good tribological properties, as evidenced by a high hardness-to-elastic modulus ratio. The optimal deposition parameters are determined to be a pulse power of 5 kW and an argon flux of 80 sccm. The resulting coating (designated as C80/5) has the highest hardness (24.95 GPa) of the various coatings and wear rates 11.1, 7.3 and 6.2 times better than those of the bare WC substrate under loads of 6 N, 10 N and 14 N, respectively. Moreover, the coating has low coefficient of friction values of 0.086, 0.098 and 0.062 under loads of 6 N, 10 N and 14 N, respectively. The micro-drilling tests show that the drill coated with C80/5 has a lifetime three times longer than that of an uncoated micro-drill.
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Diamond and Carbon-based Materials Research · Metal and Thin Film Mechanics · Advanced materials and composites

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (43)

Show source-provided references
1. Q. Wei and J. Narayan, Superhard diamondlike carbon: preparation, theory, and properties, Int. Mater. Rev., 2000, 45, p 133–16410.1179/095066000101528340 ↗
2. K. Bewilogua and D. Hofmann, History of diamond-like carbon films—From first experiments to worldwide applications, Surf. Coat. Tech., 2014, 242, p 214–22510.1016/j.surfcoat.2014.01.031 ↗
3. M. Panda, R. Krishnan, N.G. Krishna, S. Amirthapandian, P. Magudapathy, and M. Kamruddin, Tuning the tribological property of PLD deposited DLC-Au nanocomposite thin films, Ceram. Int., 2019, 45, p 8847–885510.1016/j.ceramint.2019.01.213 ↗
4. J. Robertson, Diamond-like amorphous carbon, Mater. Sci. Eng. R. Rep., 2002, 37, p 129–28110.1016/S0927-796X(02)00005-0 ↗
5. G. Gotzmann, J. Beckmann, C. Wetzel, B. Scholz, U. Herrmann, and J. Neunzehn, Electron-beam modification of DLC coatings for biomedical applications, Surf. Coat. Tech., 2017, 311, p 248–25610.1016/j.surfcoat.2016.12.080 ↗
6. S.N. Kundu, M. Basu, K.K. Chattopadhyay, A.B. Maity, S. Chaudhuri, and A.K. Pal, Optical properties of mixed deposited by dc magnetron carbon target, Vacuum, 1997, 48, p 435–44110.1016/S0042-207X(96)00306-5 ↗
7. O. Sharifahmadian and F. Mahboubi, A comparative study of microstructural and tribological properties of NDLC/DLC double layer and single layer coatings deposited by DC-pulsed PACVD process, Ceram. Int., 2019, 45, p 7736–774210.1016/j.ceramint.2019.01.076 ↗
8. F.D. Duminica, R. Belchi, L. Libralesso, and D. Mercier, Investigation of Cr(N)/DLC multilayer coatings elaborated by PVD for high wear resistance and low friction applications, Surf. Coat. Tech., 2018, 337, p 396–40310.1016/j.surfcoat.2018.01.052 ↗
9. G. Fedosenko, A. Schwabedissen, D. Korzec, and J. Engemann, Diamond-like carbon film deposition by a 13.56 MHz hollow cathode RF-RF system using different precursor gases, Appl. Surf. Sci., 2001, 142–144, p 693–697
10. Z. Zhang, H. Zhou, D. Guo, H. Gao, and R. Kang, Optical characterization of hydrogen-free CeO2 doped DLC films deposited by unbalanced magnetron sputtering, Appl. Surf. Sci., 2008, 255, p 2655–265910.1016/j.apsusc.2008.08.002 ↗
11. U. Helmersson, M. Lattemann, J. Bohlmark, A.P. Ehiasarian, and J.T. Gudmundsson, Ionized physical vapor deposition (IPVD): a review of technology and applications, Thin Solid Films, 2006, 513, p 1–2410.1016/j.tsf.2006.03.033 ↗
12. A. Wiatrowski, W. Kijaszek, W.M. Posadowski, W. Oleszkiewicz, J. Jadczak, and P. Kunickia, Deposition of diamond-like carbon thin films by the high-power impulse magnetron sputtering method, Diam. Relat. Mater., 2017, 72, p 71–7610.1016/j.diamond.2017.01.007 ↗
13. J.A. Santiago, I. Fernández-Martínez, T. Kozák, J. Capek, A. Wennberg, J.M. Molina-Aldareguia, V. Bellido-González, R. González-Arrabal, and M.A. Monclús, The influence of positive pulses on HiPIMS deposition of hard DLC coatings, Surf. Coat. Tech., 2019, 358, p 43–4910.1016/j.surfcoat.2018.11.001 ↗
14. F. Lofaj, M. Kabátová, M. Klich, D. Vaňa, and J. Dobrovodský, The comparison of structure and properties in DC magnetron sputtered and HiPIMS W–C: H coatings with different hydrogen content, Ceram. Int., 2019, 45, p 9502–951410.1016/j.ceramint.2018.09.219 ↗
15. A.D. Monteynard, F. Schuster, A. Billard, and F. Sanchette, Properties of chromium thin films deposited in a hollow cathode magnetron powered by pulsed DC or HiPIMS, Surf. Coat. Tech., 2017, 330, p 241–24810.1016/j.surfcoat.2017.10.006 ↗
16. T. Konishi, K. Yukimura, and K. Takaki, Fabrication of diamond-like carbon films using short-pulse HiPIMS, Surf. Coat. Tech., 2016, 286, p 239–24510.1016/j.surfcoat.2015.12.010 ↗
17. K.D. Bakoglidis, S. Schmidt, G. Greczynski, and L. Hultman, Improved adhesion of carbon nitride coatings on steel substrates using metal HiPIMS pretreatments, Surf. Coat. Tech., 2016, 302, p 454–46210.1016/j.surfcoat.2016.06.048 ↗
18. M.C.R. Guimaraes, B.C.N.M. de Castilho, T. de, S. Nossa, P.R.T. Avila, S. Cucatti, F. Alvarez, J.L. Garcia, and H.C. Pinto, On the effect of substrate oscillation on CrN coatings deposited by HiPIMS and dcMS, Surf. Coat. Tech., 2018, 340, p 112–12010.1016/j.surfcoat.2018.02.028 ↗
19. A. Ferrec, J. Keraudy, S. Jacq, F. Schuster, P.Y. Jouan, and M.A. Djouadi, Correlation between mass-spectrometer measurements and thin film characteristics using dcMS and HiPIMS discharges, Surf. Coat. Tech., 2014, 250, p 52–5610.1016/j.surfcoat.2014.02.030 ↗
20. J. Bohlmark, J.T. Gudmundsson, J. Alami, M. Latteman, and U. Helmersson, Spatial electron density distribution in a high-power pulsed magnetron discharge, IEEE Trans. Plasma Sci., 2005, 33, p 346–34710.1109/TPS.2005.845022 ↗
21. L. Wang, L. Li, and X. Kuang, Effect of substrate bias on microstructure and mechanical properties of WC-DLC coatings deposited by HiPIMS, Surf. Coat. Technol., 2018, 352, p 33–4110.1016/j.surfcoat.2018.07.088 ↗
22. Q. Ma, L. Li, Y. Xu, J. Gu, L. Wang, and Y. Xu, Effect of bias voltage on TiAlSiN nanocomposite coatings deposited by HiPIMS, Appl. Surf. Sci., 2017, 392, p 826–83310.1016/j.apsusc.2016.09.028 ↗
23. T.F. Zhang, J.J. Pu, Q.X. Xia, M.J. Son, and K.H. Kim, Materialstoday, microstructure and Nano-wear property of Si-doped diamondlike carbon films deposited by a hybrid sputtering system, Proceedings, 2016, 3, p 190–196
24. M. Bowes and J.W. Bradley, Inert gas effects on the deposition rate of TiO2 during reactive HiPIMS, Surf. Coat. Tech., 2014, 250, p 2–610.1016/j.surfcoat.2014.02.009 ↗
25. W.H. Kao, High-speed drilling performance of coated micro-drills with Zr–C:H:Nx% coatings, Wear, 2009, 267, p 1068–107410.1016/j.wear.2008.12.037 ↗
26. A.C. Ferrari and J. Robertson, Interpretation of Raman spectra of disordered and amorphous carbon, Phys. Rev. B., 2000, 61, p 1409510.1103/PhysRevB.61.14095 ↗
27. C. Casiraghi, A.C. Ferrari, and J. Robertson, Raman spectroscopy of hydrogenated amorphous carbons, Phys. Rev. B., 2005, 72, p 08540110.1103/PhysRevB.72.085401 ↗
28. J. Lin, W.D. Sproul, R. Wei, and R. Chistyakov, Diamond like carbon films deposited by HiPIMS using oscillatory voltage pulses, Surf. Coat. Tech., 2014, 258, p 1212–122210.1016/j.surfcoat.2014.06.061 ↗
29. W. Diyatmika, F.K. Liang, B.S. Lou, J.H. Lu, D.E. Sun, and J.W. Lee, Superimposed high power impulse and middle frequency magnetron sputtering: role of pulse duration and average power of middle frequency, Surf. Coat. Tech., 2018, 352, p 680–68910.1016/j.surfcoat.2017.11.057 ↗
30. F. Anjum, R. Ahmad, N. Afzal, and G. Murtaza, Characterization of InN films prepared using magnetron sputtering at variable power, Mater. Lett., 2018, 219, p 23–2810.1016/j.matlet.2018.02.058 ↗
31. Z. Wang, D. Zhang, P. Ke, X. Liu, and A. Wang, Influence of substrate negative bias on structure and properties of TiN coatings prepared by hybrid HIPIMS method, J. Mater. Sci. Technol., 2015, 31(1), p 37–4210.1016/j.jmst.2014.06.002 ↗
32. K. Macák, V. Kouznetsov, J. Schneider, U. Helmersson, and I. Petrov, Ionized sputter deposition using an extremely high plasma density pulsed magnetron discharge, J. Vac. Sci. Technol., A, 2000, 18, p 1533–153710.1116/1.582380 ↗
33. A. Leyland and A. Matthews, On the significance of the H/E ratio in wear control: a nanocomposite coating approach to optimised tribological behaviour, Wear, 2000, 246, p 1–1110.1016/S0043-1648(00)00488-9 ↗
34. B. Ren, S.J. Lv, R.F. Zhao, Z.X. Liu, and S.K. Guan, Effect of sputtering parameters on (AlCrMnMoNiZr)N films, Surf. Eng., 2014, 30, p 152–15810.1179/1743294413Y.0000000226 ↗
35. B. Ren, Z.X. Liu, L. Shi, B. Cai, and M.X. Wang, Structure and properties of (AlCrMnMoNiZrB0.1)Nx coatings prepared by reactive DC sputtering, Appl. Surf. Sci., 2011, 257, p 7172–717810.1016/j.apsusc.2011.03.083 ↗
36. Y.S. Jhong, C.W. Huang, and S.J. Lin, Effects of CH4 flow ratio on the structure and properties of reactively sputtered (CrNbSiTiZr)Cx coatings, Mater. Chem. Phys., 2018, 210, p 348–35210.1016/j.matchemphys.2017.08.002 ↗
37. M. Lattemann, A.P. Ehiasarian, J. Bohlmark, P.Å.O. Persson, and U. Helmersson, Investigation of high power impulse magnetron sputtering pretreated interfaces for adhesion enhancement of hard coatings on steel, Surf. Coat. Technol., 2006, 200, p 6495–649910.1016/j.surfcoat.2005.11.082 ↗
38. J. E. E. Baglin, Interface Structure, Adhesion and Ion Beam Processing, in: Y. Pauleau (Ed.) Mater. Process. Surf. Interface Eng. Kluwer Academic Publishers, 1995, p 111–149.10.1007/978-94-011-0077-9_4 ↗
39. M.M. Morshed, B.P. McNamara, D.C. Cameron, and M.S.J. Hashmi, Effect of surface treatment on the adhesion of DLC film on 316L stainless steel, Surf. Coat. Technol., 2003, 163–164, p 541–54510.1016/S0257-8972(02)00619-9 ↗
40. K.D. Bakoglidis, S. Schmidt, M. Garbrecht, I.G. Ivanov, J. Jensen, G. Greczynski et al., Low-temperature growth of low friction wear-resistant amorphous carbon nitride thin films by mid-frequency, high power impulse, direct current magnetron sputtering, J. Vac. Sci. Technol., 2015, A 33, p 05E11210.1116/1.4923275 ↗
41. E. Konca, Y.T. Cheng, and A.T. Alpas, Sliding wear of non-hydrogenated diamond-like carbon coatings against magnesium, Surf. Coat. Technol., 2006, 201, p 4352–435610.1016/j.surfcoat.2006.08.084 ↗
42. V. Tiron, I.L. Velicu, D. Cristea, N. Lupu, G. Stoian, and D. Munteanu, Influence of ion-to-neutral flux ratio on the mechanical and tribological properties of TiN coatings deposited by HiPIMS, Surf. Coat. Technol., 2018, 352, p 690–69810.1016/j.surfcoat.2017.11.048 ↗
43. J. Musil, F. Kunc, H. Zeman, and H. Poláková, Relationships between hardness, Young’s modulus and elastic recovery in hard nanocomposite coatings, Surf. Coat. Technol., 2002, 154, p 304–31310.1016/S0257-8972(01)01714-5 ↗