Recent Developments and Applications of TiN-Based Films Synthesized by Magnetron Sputtering
Source abstract
Abstract
Magnetron sputtering is a plasma-based Physical Vapor Deposition technique for synthesis of surface coatings. In the present survey, we have summarized and discussed in detail both previous trends and recent developments on magnetron sputtering-based TiN coating deposition. TiN is a frontline surface engineering material. TiN in the form of multilayers and composites find several industrial applications ranging from tribology to microelectronics. Various magnetron sputtering configurations used to derive TiN coating architectures are discussed. The survey includes overview of mechanical as well as tribological properties variations observed in coatings due to alteration in deposition process parameters. In addition, process parameters used by various research groups for synthesis of TiN coatings have been compared. The multi-component coatings derived from TiN like TiAlN, TiCN, TiCrN, TiBN, TiSiN, Ti/VN as well as Cr- and Nb-based nitrides are also discussed. With respect to manufacturing industry, which is reliant on cutting tools, TiN-based coatings have been used to improve reliability, efficiency and longevity. The technical advantages are ascribed to high hardness, good adhesive properties, enhanced tribological characteristics and corrosion-resistant behavior. Magnetic field variation and its effect on deposition behavior have also been surveyed. The survey includes discussion on enhanced wear resistance arising from addition of MoS2 and WS2. In addition, oxidation resistance enhancement by incorporation of Al and Cr has been deliberated. Si incorporation that contributes to both wear and oxidation resistance is also highlighted. The sputtering technique variants includes discussion on upcoming High Power Impulse Magnetron Sputtering. Future research directions based on plasma simulation and modeling along with surface analytical approach to have in depth insight into magnetron-sputtered coatings are introduced.
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Diamond and Carbon-based Materials Research · GaN-based semiconductor devices and materials
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (100+)
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