First-principles-informed unified transport model for resolving parameter non-identifiability in sub-10 nm ruthenium interconnects

Abstract

Research context

OpenAlex topics: Copper Interconnects and Reliability · Low-power high-performance VLSI design · Electronic Packaging and Soldering Technologies

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Affiliations

Program for Semiconductor Devices, Materials, and Hetero-integration, Graduate School of Advanced Technology, National Taiwan University, Taipei 106319, Taiwan

Global Undergraduate Program in Semiconductors, National Taiwan University, Taipei 106319, Taiwan

Graduate Institute of Electronics Engineering, National Taiwan University, Taipei 106319, Taiwan

Institute of Applied Mechanics, National Taiwan University, Taipei 106319, Taiwan

Funding

National Taiwan University · National Science and Technology Council

References (30)