Atomic layer deposition of molybdenum carbide and substrate-dependent reduction to metallic molybdenum
Source abstract
Abstract
Development of a novel molybdenum carbide ALD process and subsequent formation of high-quality metallic molybdenum films via substrate dependent decarburization.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short
Research context
OpenAlex topics: Semiconductor materials and devices · Copper Interconnects and Reliability · Semiconductor materials and interfaces
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Department of Materials Science and Engineering, Incheon National University, Incheon 22012, Republic of Korea
Department of Chemistry, Carleton University, Ottawa, Ontario K1S 5B6, Canada
References (72)
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