journal article·2026

Unravelling the mechanism of phase fraction modulation via process parameter tuning and first-principles study for enhanced TCR in VO x -based uncooled microbolometers

Sooraj Kumar, Gagan Kumar Sharma, Ujjwal Chitnis, Shalini Singh, Jay Krishna Anand, Poojalakshmi Vageeswaran, Rajesh Kumar Sharma, Shankar Dutta, Santanu Das, Dibyajyoti Ghosh, Davinder Kaur, Ankur Goswami

Journal of Materials Chemistry C· Volume 14· Issue 5
Publisher page

Abstract

Changing the Ar/O 2 flow ratio at the gas inlet leads to an increase in TCR at low-temperature deposition in a sputtering chamber.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short

Research context

OpenAlex topics: Transition Metal Oxide Nanomaterials · Surface Roughness and Optical Measurements · Infrared Target Detection Methodologies

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

Department of Materials Science and Engineering, Indian Institute of Technology, Delhi, Hauz Khas, New Delhi 110016, India

Functional Nanomaterials Research Laboratory (FNRL), Department of Physics and Centre for Nanotechnology, Indian Institute of Technology Roorkee, Roorkee 247667, Uttarakhand, India

School of Interdisciplinary Research, Indian Institute of Technology, Delhi, Hauz Khas, New Delhi 110016, India

Solid State Physics Laboratory, DRDO, Lucknow Road, Timarpur, Delhi 110054, India

Department of Ceramic Engineering, Indian Institute of Technology (BHU), Varanasi 221005, Uttar Pradesh, India

Department of Chemistry, Indian Institute of Technology, Delhi, Hauz Khas, New Delhi 110016, India

References (61)

Show source-provided references
1. Kim · Sens. Actuators, A · 2001 · 89 · 2210.1016/S0924-4247(00)00532-X ↗
2. Sun · M2RSM · 2011 · 1
3. Thomas · Proc. SPIE · 1998 · 3379 · 14510.1117/12.317581 ↗
4. R.Méndez-Rial , Á.Souto-López , J.Rodríguez-García , J.Rodríguez-Araújo and A.García-Díaz , IEEE International Conference on Imaging Systems and Techniques (IST) , 2016 , pp. 206–210
5. Yon · Adv. Microsyst. Automotive Appl. · 2003 · 2003 · 137
6. Moisello · Micromachines · 2021 · 12 · 14810.3390/mi12020148 ↗
7. Deane · Sensors · 2020 · 20 · 338110.3390/s20123381 ↗
8. Yadav · Sens. Actuators, A · 2022 · 342 · 11361110.1016/j.sna.2022.113611 ↗
9. Syllaios · OPL · 2000 · 609 · 144
10. Qi · Proc. SPIE · 2009 · 7298 · 72980K
11. Jagtap · Thin Solid Films · 2012 · 520 · 475410.1016/j.tsf.2011.10.127 ↗
12. Chuan · Proc. SPIE · 2011 · 8012 · 80121N10.1117/12.886475 ↗
13. Shie · J. Microelectromech. Syst. · 1996 · 5 · 29810.1109/84.546409 ↗
14. Kim · Infrared Phys. Technol. · 2011 · 54 · 1010.1016/j.infrared.2010.10.001 ↗
15. Bin · Opt. Eng. · 2012 · 51 · 07400310.1117/1.OE.51.7.074003 ↗
16. Yu · Micromachines · 2020 · 11 · 80010.3390/mi11090800 ↗
17. Bahlawane · Chem. Vap. Deposition · 2014 · 20 · 29910.1002/cvde.201400057 ↗
18. Liu · JJAP Ser. · 2014 · 53 · 03320110.7567/JJAP.53.033201 ↗
19. Abdel-Rahman · Sensors · 2019 · 19 · 132010.3390/s19061320 ↗
20. Hendrix · J. Mater. Sci.: Mater. Electron. · 1992 · 3 · 113
21. Su · Appl. Surf. Sci. · 2015 · 357 · 88710.1016/j.apsusc.2015.09.068 ↗
22. Bukhari · Appl. Surf. Sci. · 2020 · 529 · 14699510.1016/j.apsusc.2020.146995 ↗
23. Case · J. Vac. Sci. Technol., A · 1984 · 2 · 150910.1116/1.572462 ↗
24. Kusano · J. Vac. Sci. Technol., A · 1988 · 6 · 166310.1116/1.575304 ↗
25. Razavi · J. Vac. Sci. Technol., A · 1990 · 8 · 139110.1116/1.576887 ↗
26. Singh · Chem. Vap. Deposition · 2014 · 20 · 29110.1002/cvde.201407122 ↗
27. Sahana · J. Appl. Phys. · 2002 · 92 · 649510.1063/1.1518148 ↗
28. Jang · Thin Solid Films · 2013 · 544 · 44810.1016/j.tsf.2013.02.083 ↗
29. Yang · Chin. Opt. Lett. · 2010 · 8 · 13710.3788/COL201008S1.0137 ↗
30. Kim · Appl. Surf. Sci. · 2024 · 645 · 15884810.1016/j.apsusc.2023.158848 ↗
31. Wang · J. Alloys Compd. · 2023 · 937 · 16829510.1016/j.jallcom.2022.168295 ↗
32. Shin · Ceram. Int. · 2022 · 48 · 1574810.1016/j.ceramint.2022.02.111 ↗
33. Dong · Appl. Surf. Sci. · 2021 · 562 · 15013810.1016/j.apsusc.2021.150138 ↗
34. Zhao · Surf. Coat. Technol. · 2022 · 434 · 12821510.1016/j.surfcoat.2022.128215 ↗
35. Kim · Thin Solid Films · 2010 · 518 · 624110.1016/j.tsf.2010.03.041 ↗
36. Tien · Adv. Condens. Matter Phys. · 2018 · 2018 · 2647282
37. Patwary · J. Appl. Phys. · 2020 · 127 · 08530210.1063/1.5144205 ↗
38. Boroomand Nasab · Semiconductors · 2020 · 54 · 84410.1134/S1063782620080151 ↗
39. Parhana · Appl. Mech. Mater. · 2021 · 903 · 9110.4028/www.scientific.net/AMM.903.91 ↗
40. Chen · Infrared Phys. Technol. · 2001 · 42 · 8710.1016/S1350-4495(01)00058-5 ↗
41. Rajendra Kumar · Smart Mater. Struct. · 2003 · 12 · 18810.1088/0964-1726/12/2/305 ↗
42. Chi-Anh · Sens. Actuators, A · 2005 · 123 · 8710.1016/j.sna.2005.04.024 ↗
43. Silversmit · J. Electron Spectrosc. Relat. Phenom. · 2004 · 135 · 16710.1016/j.elspec.2004.03.004 ↗
44. Biesinger · Appl. Surf. Sci. · 2010 · 257 · 88710.1016/j.apsusc.2010.07.086 ↗
45. Wang · Surf. Rev. Lett. · 2008 · 15 · 5910.1142/S0218625X08010956 ↗
46. Cheng · Phys. Rev. B · 2016 · 93 · 18410910.1103/PhysRevB.93.184109 ↗
47. Ureña-Begara · Appl. Surf. Sci. · 2017 · 403 · 71710.1016/j.apsusc.2017.01.160 ↗
48. Mendialdua · J. Electron Spectrosc. Relat. Phenom. · 1995 · 71 · 24910.1016/0368-2048(94)02291-7 ↗
49. Silversmit · Surf. Sci. · 2006 · 600 · 351210.1016/j.susc.2006.07.006 ↗
50. Barimah · Sci. Rep. · 2022 · 12 · 1142110.1038/s41598-022-15439-5 ↗
51. Ho · Appl. Surf. Sci. · 2019 · 495 · 14343610.1016/j.apsusc.2019.07.178 ↗
52. Usha · Mater. Chem. Phys. · 2023 · 294 · 12700710.1016/j.matchemphys.2022.127007 ↗
53. K.Wasa and S.Hayakawa , Handbook of sputter deposition technology , Noyes Publications , United States, Park Ridge, NJ (United States) , 1992
54. Hammad · Phys. B · 2019 · 568 · 610.1016/j.physb.2019.05.012 ↗
55. A.Edgar , O.Jairo and C.Gloria , Crystallization , 2012 , ch. 15 10.5772/3584410.5772/35844 ↗
56. Al-Kuhaili · Surf. Interface Anal. · 2013 · 45 · 135310.1002/sia.5289 ↗
57. Bukhari · Appl. Surf. Sci. · 2020 · 529 · 14699510.1016/j.apsusc.2020.146995 ↗
58. Einollahzadeh-Samadi · Appl. Surf. Sci. · 2013 · 280 · 26310.1016/j.apsusc.2013.04.146 ↗
59. Maghazeii · Opt. Commun. · 2008 · 281 · 468710.1016/j.optcom.2008.05.051 ↗
60. Ryu · ETRI J. · 2009 · 31 · 70310.4218/etrij.09.1209.0014 ↗
61. Sharma · Microporous Mesoporous Mater. · 2021 · 324 · 11130210.1016/j.micromeso.2021.111302 ↗