Plasma-enhanced ALD growth of ε-(Al x Ga 1− x ) 2 O 3 alloy films with high Al content and tunable band offsets
Abstract
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Research context
OpenAlex topics: Ga2O3 and related materials · GaN-based semiconductor devices and materials · Copper-based nanomaterials and applications
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Affiliations
State Key Laboratory of Crystal Materials, Institute of novel semiconductors, Institute of Crystal Materials, Shandong University, Jinan, Shandong, 250100, China
School of Integrated Circuits, Nanjing University, Suzhou, Jiangsu, 215163, China
Vacuum Interconnected Nanotech Workstation, Suzhou Institute of Nano-Tech and Nano-Bionics, CAS, 215123, Suzhou, China
Shandong Research Institute of Industrial Technology, Jinan, Shandong, 250100, China
Funding
National Natural Science Foundation of China · Natural Science Foundation of Jiangsu Province · Science and Technology Planning Project of Shenzen Municipality