Conformal ALD of tin-doped indium oxide transparent p-ohmic contacts for micro- and nano-LEDs
Abstract
Research context
OpenAlex topics: Thin-Film Transistor Technologies · Nanomaterials and Printing Technologies · Phase-change materials and chalcogenides
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Affiliations
Department of Materials Science and Engineering, Research Institute of Advanced Materials, Seoul National University, Seoul, 08826, Republic of Korea
KU-KIST Graduate School of Converging Science and Technology, Korea University, Seoul, 02841, Republic of Korea
Electronic and Hybrid Materials Research Center, Korea Institute of Science and Technology, Seoul, 02792, Republic of Korea
Department of Physics, Chonnam National University, Gwangju, 500-757, Republic of Korea
Department of Mechanical Engineering, Massachusetts Institute of Technology, Cambridge, Massachusetts, 02139, USA
Advance Institute of Convergence Technology, Seoul National University, Suwon, 16229, Republic of Korea
Funding
Ministry of Trade, Industry and Energy · Ministry of Science and ICT, South Korea