Correction: Composition control of conformal crystalline GeSbTe films by atomic layer deposition supercycles and tellurization annealing
Source abstract
Abstract
Correction for ‘Composition control of conformal crystalline GeSbTe films by atomic layer deposition supercycles and tellurization annealing’ by Yewon Kim et al. , J. Mater. Chem. C , 2022, 10 , 9691–9698, DOI: https://doi.org/10.1039/D2TC00784C.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short
Research context
OpenAlex topics: Chalcogenide Semiconductor Thin Films
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Affiliations
Departments of Nanotechnology and Advanced Materials Engineering, Sejong University, Seoul 05006, Republic of Korea
Process Development, Semiconductor R&D Center, Samsung Electronics Co., Ltd., 1, Samsungjeonja-ro, Hwaseong-si, Gyeonggi-do 18448, Republic of Korea
Funding
Samsung
References
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