Fabrication and characterization of ReO 3 -type dielectric films
Source abstract
Abstract
ReO 3 -type NbO 2 F and TaO 2 F thin films were synthesized using HF vapor oxidation. It was confirmed for the first time that these ReO 3 -type films can function as dielectric materials, as demonstrated both theoretically and experimentally.
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Research context
OpenAlex topics: Ferroelectric and Piezoelectric Materials · Semiconductor materials and devices · Microwave Dielectric Ceramics Synthesis
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Material Research Center for Element Strategy
Tokyo Institute of Technology
Yokohama
Japan
Nanostructures Research Laboratory
Japan Fine Ceramics Center
Nagoya 456-8587
School of Materials and Chemical Technology
Funding
Japan Society for the Promotion of Science · Ministry of Education, Culture, Sports, Science and Technology
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