journal article·2021

Revealing the crystal structures and relative dielectric constants of fluorinated silicon oxides

Pengyan Xue, Junwei Feng, Congwei Xie, Lan Wang, Abudukadi Tudi, Evgenii V. Tikhonov, Keith T. Butler

Journal of Materials Chemistry C· Volume 9· Issue 44
Publisher page

Abstract

In this work, we show that the levels of fluorine doped into silica are high enough and we have predicted some hitherto unknown fluorinated silica with expected properties.
Only a short abstract or summary was supplied by the source.
Source: crossref · Quality: short

Research context

OpenAlex topics: Silicone and Siloxane Chemistry · Advanced ceramic materials synthesis · Ga2O3 and related materials

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

Affiliations

International Center for Materials Discovery, School of Material Science and Engineering, Northwestern Polytechnical University, 127 YouYi Western Road, Xi’an, Shaanxi, 710072, China

State Key Laboratory of Solidification Processing, School of Material Science and Engineering, Northwestern Polytechnical University, Xi’an, Shaanxi, 710072, China

CAS Key Laboratory of Functional Materials and Devices for Special Environments, Xinjiang Technical Institute of Physics & Chemistry, CAS; Xinjiang Key Laboratory of Electronic Information Materials and Devices, Urumqi 830011, China

Skolkovo Institute of Science and Technology, Skolkovo Innovation Center, 143026, 3 Nobel Street, Moscow, Russian Federation

Department of Chemistry, University of Reading, Whiteknights, RG6 6AH, UK

References (37)

Show source-provided references
1. S. R.Wilson , C. J.Tracy and J. L.Freeman Jr , Handbook of Multilevel Metallization for Integrated Circuits: Materials, Technology, and Applications , Noyes Publications , Park Ridge , 1993
2. Shamiryan · Mater. Today · 2004 · 7 · 3410.1016/S1369-7021(04)00053-7 ↗
3. Volksen · Chem. Rev. · 2010 · 110 · 5610.1021/cr9002819 ↗
4. Grill · J. Vac. Sci. Technol., B: Nanotechnol. Microelectron.: Mater., Process., Meas., Phenom. · 2016 · 34 · 020801
5. Lew · Adv. Funct. Mater. · 2008 · 18 · 345410.1002/adfm.200800390 ↗
6. Hong · Nature · 2020 · 582 · 51110.1038/s41586-020-2375-9 ↗
7. Zhou · Adv. Funct. Mater. · 2021 · 210207410.1002/adfm.202102074 ↗
8. Shao · Angew. Chem., Int. Ed. · 2018 · 57 · 1650110.1002/anie.201811250 ↗
9. Evans · Nat. Mater. · 2021 · 1
10. Peng · Nano Lett. · 2020 · 21 · 20310.1021/acs.nanolett.0c03528 ↗
11. Jain · APL Mater. · 2013 · 1 · 01100210.1063/1.4812323 ↗
12. Oganov · J. Chem. Phys. · 2006 · 124 · 24470410.1063/1.2210932 ↗
13. Glass · Comput. Phys. Commun. · 2006 · 175 · 71310.1016/j.cpc.2006.07.020 ↗
14. Kohn · Phys. Rev. · 1965 · 140 · A113310.1103/PhysRev.140.A1133 ↗
15. Blöchl · Phys. Rev. B: Condens. Matter Mater. Phys. · 1994 · 50 · 1795310.1103/PhysRevB.50.17953 ↗
16. Kresse · Phys. Rev. B: Condens. Matter Mater. Phys. · 1996 · 54 · 1116910.1103/PhysRevB.54.11169 ↗
17. Perdew · Phys. Rev. Lett. · 1996 · 77 · 386510.1103/PhysRevLett.77.3865 ↗
18. Baroni · Rev. Mod. Phys. · 2001 · 73 · 51510.1103/RevModPhys.73.515 ↗
19. Rignanese · Phys. Rev. Lett. · 2002 · 89 · 11760110.1103/PhysRevLett.89.117601 ↗
20. Xie · Appl. Phys. Lett. · 2014 · 105 · 02290710.1063/1.4890464 ↗
21. Xie · Sci. Rep. · 2015 · 5 · 1
22. Clark · Z. Kristallogr. · 2005 · 220 · 56710.1524/zkri.220.5.567.65075 ↗
23. Momma · J. Appl. Crystallogr. · 2011 · 44 · 127210.1107/S0021889811038970 ↗
24. Sun · Sci. Adv. · 2016 · 2 · e160022510.1126/sciadv.1600225 ↗
25. Jorgensen · J. Appl. Phys. · 1978 · 49 · 547310.1063/1.324517 ↗
26. Demuth · J. Phys.: Condens. Matter · 1999 · 11 · 3833
27. Pauling · J. Am. Chem. Soc. · 1929 · 51 · 101010.1021/ja01379a006 ↗
28. Usami · Jpn. J. Appl. Phys. · 1994 · 33 · 40810.1143/JJAP.33.408 ↗
29. Han · J. Appl. Phys. · 1998 · 83 · 217210.1063/1.366955 ↗
30. Hasegawa · J. Non-Cryst. Solids · 1998 · 240 · 15410.1016/S0022-3093(98)00712-1 ↗
31. Demkov · Mater. Res. Soc. Symp. Proc. · 1999 · 612 · 38110.1557/PROC-612-D3.8.1 ↗
32. Penn · Phys. Rev. · 1962 · 128 · 209310.1103/PhysRev.128.2093 ↗
33. Phillips · Phys. Rev. Lett. · 1967 · 19 · 41510.1103/PhysRevLett.19.415 ↗
34. Phillips · Phys. Rev. Lett. · 1968 · 20 · 55010.1103/PhysRevLett.20.550 ↗
35. Zeng · Acta Crystallogr., Sect. C: Struct. Chem. · 2013 · C70 · 76
36. Zhang · Angew. Chem., Int. Ed. · 2017 · 56 · 110.1002/anie.201610955 ↗
37. Yang · Chem. Mater. · 2019 · 31 · 280710.1021/acs.chemmater.8b05175 ↗