Chlorine-mediated atomic layer deposition of HfO 2 on graphene
Abstract
Research context
OpenAlex topics: Semiconductor materials and devices · Graphene research and applications · Advanced Memory and Neural Computing
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
Affiliations
Sensors and Electron Devices Directorate, United States Army Research Laboratory, Adelphi, MD, USA
Department of Physics, Lehigh University, Bethlehem, PA 18015, USA
Institute for Functional Materials and Devices, Lehigh University, Bethlehem, PA 18015, USA
Materials Science and Engineering Center, Columbia University, New York, NY 10023, USA
Department of Science and Mathematics, Fashion Institute of Technology, New York, NY 10001, USA
Department of Mechanical Engineering, Columbia University, New York, New York 10027, USA
Funding
National Science Foundation · Army Research Laboratory · Lehigh University