Modulation of optical and electrical properties in hexagonal boron nitride by defects induced via oxygen plasma treatment

Abstract Defects in hexagonal boron nitride (hBN) have attracted much attention since they are effectively used for nanoelectronics, such as single-photon emitters or memristors. The method for generating and controlling hBN defects is important because the defects are critical factors determining the optical and electrical properties of hBN. Here, we demonstrate the modulation of optical and electrical properties of hBN by defects generated via mild oxygen plasma treatment. The photoluminescence peaks related to defects were observed at a broad range (∼3.8 eV), and the current of plasma-treated hBN flow at the lower threshold voltage compared to the as-exfoliated hBN due to the formation of defect paths inside the hBN structure. We also demonstrate that the bandgap structure of hBN can be tuned by the oxygen plasma treatment. Our findings are useful for the stable and reliable fabrication of two-dimensional electronic devices using hBN in the future.