Distribution of nitrogen in a magnetic tunnel junction with nitrogen-treated interface

Abstract Magnetic tunnel junctions with a Fe-pinned magnetic layer that was exposed to nitrogen plasma for a few tens of seconds were characterized by X-ray photoelectron spectroscopy and auger electron spectroscopy after thermal annealing at various temperatures. The nitrogen, which initially existed in both sides of the Al and Fe layers, was found diffused into FeMn layer after annealing at 230°C, leaving no nitrogen in the Fe layer. The role of the diffused nitrogen is discussed in terms of the physical properties of junction.