The intensity profiles of the focused spot in the near-field optical SIL plus objective lens system

Abstract The approximation of quasi-vector diffraction theory is employed to calculate the intensity profiles and the transmittance of numerical aperture (NA) 0.85 and 0.65 near-field optical solid immersion lens systems. The numerical results of the calculation are obtained. It is found that the near-field optical system with higher NA objective lens can obtain smaller optical spot size, but lower transmittance, compared with the one with lower NA objective lens.