Fabrication and magnetic properties of Nd11.4La0.6Fe76M2B10 (M=Ti,Cr) films

Abstract Hard magnetic films Nd 11.4 La 0.6 Fe 76 M 2 B 10 (M=Ti and Cr) were fabricated by DC sputtering to explore the possible applications in micro-electrical mechanical systems. X-ray diffraction data indicate that the Ti-containing sample consists of R 2 Fe 14 B and minor phases of Fe 3 B and R 2 Fe 23 B 3 . For the Cr-containing sample, only R 2 Fe 14 B and Fe 3 B phases were observed. The Nd 11.4 La 0.6 Fe 76 Ti 2 B 10 film exhibits better magnetic properties of B r =7.0 kG, i H c =11.5 kOe, and ( BH ) max =11.0 MG Oe. The smaller amount of soft magnetic Fe 3 B phase and the refined microstructure may account for the improved magnetic properties. Optimum process parameters are strongly dependent on the chemical compositions of the films, including post-annealing, working pressure of Ar, and thickness of the film, etc.