A new sputtering source for magnetic film preparation
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Abstract
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Research context
OpenAlex topics: Metal and Thin Film Mechanics · Plasma Diagnostics and Applications · Copper Interconnects and Reliability
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References (9)
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1. Hoshi · IEICE Japan · 1982 · J65-C · 490
2. Nakamura · IEEE Trans. Magn. · 1983 · 18 · 108010.1109/TMAG.1982.1062177 ↗
3. Yasumura · IEEE Trans. Magn. · 1987 · 24 · 279410.1109/TMAG.1987.1065593 ↗
4. Naoe · IEEE Trans. Magn. · 1980 · 16 · 64010.1109/TMAG.1980.1060684 ↗
5. Takahashi · J. Magn. Soc. Japan · 1986 · 10 · 5110.3379/jmsjmag.10.51 ↗
6. Kukula · IEEE Trans. Magn. · 1987 · 23 · 13710.1109/TMAG.1987.1064742 ↗
7. Ouchi · J. Magn. Soc. Japan · 1991 · 15 · 12510.3379/jmsjmag.15.125 ↗
8. Ouchi · IEEE Trans. Magn. · 1987 · 23 · 13710.1109/TMAG.1987.1064742 ↗
9. Ohkijima · J. Magn. Soc. Japan · 1991 · 15 · 125