X-ray scattering topography of metallic multilayer films
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Abstract
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Research context
OpenAlex topics: Copper Interconnects and Reliability · Metal and Thin Film Mechanics · Surface and Thin Film Phenomena
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References (2)
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1. Chikaura · J. Appl. Crystallogr. · 1982 · 15 · 4810.1107/S0021889882011339 ↗
2. Chikaura · Jpn. J. Appl. Phys. · 1990 · 29 · L37810.1143/JJAP.29.L378 ↗