journal article·1999-06

Multilayer growth by low energy ion beam deposition

D.E Joyce, N.D Telling, J.A Van den Berg, D.G Lord, P.J Grundy

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Abstract

No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.

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Research context

OpenAlex topics: Semiconductor materials and devices · Copper Interconnects and Reliability · Electron and X-Ray Spectroscopy Techniques

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References (1)

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1. Armour · Nucl. Instr. and Meth. B · 1994 · 89 · 32510.1016/0168-583X(94)95193-4 ↗