journal article·1993-09

Fabrication and X-ray diffraction studies of Er/C multilayer films

E. Gu, M.A. Player, G.V. Marr, H. Savaloni

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Abstract

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Research context

OpenAlex topics: Copper Interconnects and Reliability · Metallurgical and Alloy Processes · Semiconductor materials and interfaces

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References (10)

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5. Savaloni · Vacuum · 1992 · 43 · 96510.1016/0042-207X(92)90009-L ↗
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9. Player · Rev. Sci. Instrum. · 1992 · 63 · 147410.1063/1.1143046 ↗
10. Petford-Long · J. Appl. Phys. · 1987 · 61 · 142210.1063/1.338122 ↗