Studies of ion implantation conditions and magnetic properties of MnAs nanoparticles buried in GaAs substrate

Abstract We present here results obtained on the synthesis of ferromagnetic MnAs nanoclusters embedded in a GaAs matrix. These nanoclusters are formed by co-implanting Mn+As at a dose of 1×10 16 ions cm −2 for both species. MnAs nanoclusters are only synthezised after a two-step annealing process consisting in a pre-anneal at 600 °C, 60 s which favours the solid-phase epitaxy of the amorphous implanted area. The best magnetic properties have been obtained after a second annealing at 750 °C, 15 s.