Microstructures and soft magnetic properties of as-deposited Fe–Sm–O thin films

Abstract The influences of O 2 partial pressure on saturation magnetization, coercivity and effective permeability of the as-deposited Fe–Sm–O thin films, which were fabricated by RF magnetron reactive sputtering method, were investigated. The nanocrystalline Fe 83.4 Sm 3.4 O 13.2 thin film fabricated at O 2 partial pressure of 5% exhibited the best magnetic softness with a saturation magnetization of 1.43 MA/m, coercivity of 65.2 A/m and effective permeability of about 2600 in the frequency range from 0.5 to 100 MHz. The electrical resistivity of Fe 83.4 Sm 3.4 O 13.2 was 130 μΩ cm. The microstructures and electrical resistivity were investigated in this work.