Electron beam recording of optical disc

Abstract The Nimbus Technology & Engineering e − Beam Mastering System was developed to gain a large improvement in optical disc and structured hard disc recording capacity, significantly more than is possible from deep UV and SIL mastering. The current electron beam recorder is essentially a production machine capable of making full-length exposures at capacities of up to 50 GB with a simple low-cost upgrade path to disc capacities of several hundred gigabytes and beyond and hard disk drives (HDD) with capacities of up to 1 tera bit per square inch.