Lift-off process for deep-submicron-size junctions using supercritical
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Abstract
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Research context
OpenAlex topics: Magnetic properties of thin films · Semiconductor materials and devices · Diamond and Carbon-based Materials Research
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References (4)
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1. Kubota · Jpn. J. Appl. Phys. · 2004 · 44 · L123710.1143/JJAP.44.L1237 ↗
2. Tulapurkar · Nature · 2005 · 438 · 33910.1038/nature04207 ↗
3. High-pressure jet lift-off system C03-020; Micro-Giken Co. Ltd., Nihon-bashi, Chuoh-ku, Tokyo, Japan 〈http://www.micro-eng.co.jp/〉.
4. Supercritical CO2 cleansing system SDCR6; Ryusho-Sangyo Co. Ltd., Konan, Takamatsu, Kagawa, Japan 〈http://www.ryusyo.co.jp/〉.