Plasma etching of NiFe/Cu and NiMnSb/Al2O3 multilayers for sub-micron pattern definition
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Abstract
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Research context
OpenAlex topics: Magnetic properties of thin films · Semiconductor materials and devices · Semiconductor materials and interfaces
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References (6)
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1. Prinz · 1994
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5. Kinoshita · IEEE Trans. Magn. · 1991 · 27 · 488810.1109/20.278980 ↗
6. Hong · J. Vac. Sci. Technol. A · 1998 · 16 · 215310.1116/1.581323 ↗