In-situ measurement of stress for Co-based superlattices during fabrication by rf-sputtering
Bibliographic record
Abstract
No abstract is available for this record. The assistant can identify its topic from the title, but cannot infer the study’s results.
Source: Not provided · Quality: missing
Research context
OpenAlex topics: Metal and Thin Film Mechanics · Metallurgical and Alloy Processes · Copper Interconnects and Reliability
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (4)
Show source-provided references
1. Carcia · Appl. Phys. Lett. · 1985 · 47 · 17810.1063/1.96254 ↗
2. Nakamura · J. Magn. Soc. Jpn. · 1989 · 13 · 31910.3379/jmsjmag.13.319 ↗
3. Klocholm · IEEE Trans. Magn. · 1976 · 12 · 81910.1109/TMAG.1976.1059251 ↗
4. Stony · Proc. Roy. Soc. (London) A · 1909 · 82 · 172