Surface characterization of substrate by ellipsometry
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Abstract
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Research context
OpenAlex topics: Surface Roughness and Optical Measurements
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References (5)
Show source-provided references
1. F. Kobayashi and E. Hirota, Preprint of the 16th INTER-MAG Conf.
2. Abbott · IBM TDB · 1978 · 21 · 1
3. Wada · IEEE Trans. Magn. MAG-16 · 1980 · 5
4. Ohira · Japan, J. Appl. Phys. · 1979 · 18 · 710.1143/JJAP.18.1243 ↗
5. Nakata · Tech. Report of Inst. of Electron. and Commun. Engineers · 1981