Advancement in NdFeB thick film magnets fabricated with YAG laser ablation system

Abstract Nd–Fe–B thick film magnets with the thickness of 10–50 μm were prepared on Ta substrates by YAG laser ablation system under the high deposition rate of 5–20 nm/s. The deposition rate was varied by controlling the distance between a substrate and a target. Usage of the deposition method enabled us to obtain Nd–Fe–B films with the thickness exceeding 100 μm on Fe substrates for the application to milli-size motors. The coercivity, Hc, and the remanence, Ir, of the prepared 300-μm-thick film were approximately 1000 kA/m and 0.6 T, respectively.