Magnetometric sensors based on planar spiral coils

R.P Almazán; L Pérez; C Aroca; M.C Sánchez; E López; P Sánchez

doi:10.1016/s0304-8853(02)00924-1

journal article·2003-01

Magnetometric sensors based on planar spiral coils

R.P Almazán, L Pérez, C Aroca, M.C Sánchez, E López, P Sánchez

Journal of Magnetism and Magnetic Materials· Volume 254-255

Publisher page

Source abstract

Abstract

Abstract By using a combination of sputtering, photolithography, and electrochemical deposition techniques spiral coils with good performances have been grown (low resistance, high number of turns/cm …). This can be used as exciting coils of a magnetic sensor or as a part of a planar inductor.

The source flagged this abstract for review. Check formulas and completeness against the original publication.

Source: openaire · Quality: needs review · Source record ↗
Source flags: short_text

Research context

Materials processing

OpenAlex topics: Magnetic Field Sensors Techniques · Sensor Technology and Measurement Systems · Non-Destructive Testing Techniques

SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.

References (7)

Show source-provided references

1. Kawabe · IEEE Trans. Magn. · 1984 · MAG-20 · 180410.1109/TMAG.1984.1063271 ↗

2. Sato · IEEE Trans. Magn. · 1991 · 27 · 527710.1109/20.278812 ↗

3. Inoue · IEEE Trans. Magn. · 1998 · 34 · 137210.1109/20.706552 ↗

4. S.Y. Ron, Hui, S.C. Tang, H. Chung, IEEE Circuits System 11 (3) (2000) 3.

5. Ripka · J. Magn. Magn. Mater. · 2000 · 215–216 · 73510.1016/S0304-8853(00)00273-0 ↗

6. Vincueira · IEEE Trans. Magn. · 1994 · 30 · 504210.1109/20.334293 ↗

7. Ripka · J. Magn. Magn. Mater. · 2000 · 157–158 · 424