A combinatorial sputtering method to prepare a wide range of A/B artificial superlattice structures on a single substrate

Abstract Using a novel combinatorial sputtering system, we have prepared a wide range of Ni/Pt artificial superlattice structures on a single 76 mm×76 mm wafer. Structures with m (1 1 1)-oriented Ni atomic layers followed by n (1 1 1)-oriented Pt atomic layers in the repeating unit were made, where 0 2 and n>2 in agreement with previous work. We believe that combinatorial artificial layered structures such as this will be useful in elucidating the magnetic properties of A/B superstructures, where the properties vary strongly with the number of atomic layers of A and B in the repeating unit.