Cross measurements of thin-film permeability up to UHF range

Abstract Permeability of the 0.37–0.79 μm thick CoNbZr and FeCoMoSiB film samples has been cross-measured in a 10 MHz–6 GHz range by the two independently developed permeameters in Japan and France. The measurement jigs are unique and the calibration procedures are also unique for both groups. The measured hard axis permeability profiles and LLG calculation for CoNbZr films agreed within an error of 15% up to 3 GHz after a demagnetizing process.