Submicron structures in thin layers by electron beam lithography and ion beam sputtering
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Abstract
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Research context
OpenAlex topics: Ion-surface interactions and analysis · Magnetic properties of thin films · Metal and Thin Film Mechanics
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References (6)
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1. Zalm · Surf. Interface Anal. · 1988 · 11 · 110.1002/sia.740110102 ↗
2. Behrisch · 1981
3. Roussigné · Thesis, Université Paris-Nord · 1995
4. Wolfram · Prog. Surf. Sci. · 1972 · 2 · 23310.1016/0079-6816(72)90001-9 ↗
5. Sharon · J. Chem. Phys. Solids · 1977 · 38 · 97110.1016/0022-3697(77)90197-4 ↗
6. Gurney · 1991