Electromagnetic optical switch for optical network communication
Source abstract
Abstract
Abstract The electromagnetic optical switch combines with Ni/Fe permalloy magnetic circuit design, high aspect ratio microstructure electroplating, bulk micromachining, excimer laser ablation and low temperature wafer bonding. The result shows it can output force 68 mN, deflection angle can reach 82 with 4820 A/m, frequency can reach 2 kHz, and bonding strength can be larger than 216 kg/cm 2 .
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Advanced MEMS and NEMS Technologies · Photonic and Optical Devices · Semiconductor Lasers and Optical Devices
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References (5)
Show source-provided references
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