The evolution of magnetic, electrical and structural properties of nanogranular [FeCoBN/SiN]×n thin films

Abstract Some results concerning the magnetic, electrical and microstructural properties of multilayer [FeCoBN/Si 3 N 4 ]× n films in view of their utilization for manufacturing thin film magnetic inductors are presented. A comparison between the magnetic, electrical and structural properties of FeCoBN and [FeCoBN/Si 3 N 4 ]× n thin films is also reported. The [FeCoBN/Si 3 N 4 ]× n thin films with the thickness of the FeCoBN layers varied from 10 to 30 nm, exhibit good soft magnetic characteristics and high values for electrical resistivity such as Ms of 172–185 A m 2 /kg, Hc of 318–1433 A/m and ρ of 82–48×10 −7 Ω m, respectively. These physical properties of the samples are discussed in relation with the microstructure of the multilayer system.