Tailoring the magnetic properties and thermal stability of FeSiAl-Al 2 O 3 thin films fabricated by hybrid oblique gradient-composition sputtering

Abstract In this study, we systematically investigate the dynamic magnetic properties of FeSiAl-Al2O3 thin films fabricated by hybrid oblique gradient-composition sputtering technique with respect to temperature ranging from 300 K to 420 K. The magnetic anisotropy field HK and ferromagnetic resonance frequency fFMR can be tuned from 14.06 to 110.18 Oe and 1.05–3.05 GHz respectively, by changing the oblique angle, which can be interpreted in terms of the contribution of stress-induced anisotropy and shape anisotropy. In addition, the thermal stability of FeSiAl-Al2O3 films in terms of magnetic anisotropy HK and ferromagnetic resonance frequency fFMR are enhanced with the increase of oblique angle up to 35° while the thermal stability of effective Gilbert damping factor αeff and the maximum imaginary permeability μ’’max are improved with the increase of oblique angle up to 45°.