Preparation of Fe/Ni–Zn–Cu ferrite stacked films by aerosol deposition method

Abstract Composite or stacked films composed of Fe and Ni–Zn–Cu ferrite were prepared by aerosol deposition (AD) method, and the relationship between magnetic properties and microstructure was investigated. Aiming to control the microstructure, two aerosol chambers and double nozzles, from which each powder ejected independently, were used in the AD system. With increase in the vibration frequency of Fe aerosol chamber ( V Fe ) or the deposition time of Fe powder ( t Fe ), the Fe content in the films increased, which was resulted in the increase of saturation magnetization and permeability. The composite or stacked films also showed relatively high-noise suppression effect (Δ P loss / P in =∼0.58). Microstructural analyses revealed that the stacked film consisted of Fe and ferrite layers with thickness of 1 and 15 μm, respectively.