Sputtered amorphous Co–Pt–P thin films for soft underlayer of perpendicular magnetic recording

Abstract In this paper, a novel amorphous Co–Pt–P thin film fabricated by DC sputtering was proposed for soft underlayer in perpendicular recording. The structural and magnetic properties of the films were investigated by X-ray diffraction (XRD) and vibrating sample magnetometer (VSM), respectively. The results show that maximum permeability of Co-12 at%Pt–P films sputtered at room temperature (RT) is quite low when the phosphorus content is less than 5.2 at%, but Co-12 at%Pt-7 at%P thin film, is of amorphous state and has a high permeability of ∼500. The excellent soft magnetic properties of maximum permeability (500), coercivity (18 Oe) and saturation magnetization (760 emu/cm 3 ) indicate that the amorphous Co-12 at%Pt-7 at%P film is expected to be a promising soft magnetic underlayer of perpendicular magnetic recording. The Co-12 at%Pt-7 at%P thin film is gradually crystallized with increasing substrate temperatures. The crystallization temperature of the Co-12 at%Pt-7 at%P thin film is ∼200 °C.