Preventing dewetting during rapid-thermal annealing of FePt films with enhanced L10 ordering by introducing Ag cap-layers
Source abstract
Abstract
Abstract High-order FePt continuous films with a strong (001) texture were fabricated on a glass substrate by introducing Ag layers and rapid thermal annealing (RTA). The dewetting of the (001)-textured FePt was suppressed during RTA with high heating rates (>80 K/s). The Ag cap layers not only increased the in-plane tensile stress, but also improved the (001) anisotropy and L 1 0 ordering of the FePt layers. All continuous Ag/FePt bilayer films possessed strong perpendicular anisotropies and high-ordered states irrespective of the Ag layer thickness.
Source: openaire · Quality: candidate unverified · Source record ↗
Research context
OpenAlex topics: Fluid Dynamics and Thin Films · Magnetic properties of thin films · Copper Interconnects and Reliability
SciVX discovery tags are terminology-based. OpenAlex topics are source-provided classifications.
References (21)
Show source-provided references
1. Directed self-assembly of block copolymers for use in bit patterned media fabrication10.1088/0022-3727/46/50/503001 ↗
2. High Ku Materials Approach to 100Gbits/in210.1109/20.824418 ↗
3. , Rapid thermal processing of magnetic materials10.1088/0022-3727/39/14/R01 ↗
4. Orientation-controlled nonepitaxial L10 CoPt and FePt films10.1063/1.1464663 ↗
5. The origin of (001) texture evolution in FePt thin films on amorphous substrates10.1063/1.2176088 ↗
6. Magnetic properties and microstructure of (001) oriented Ag/FePt and Ag/FePt/Ag films10.1016/j.jallcom.2009.07.182 ↗
7. Effect of intrinisic tensile stress on (001) orientation in L10 FePt thin films on glass substrates10.1063/1.3670515 ↗
8. Direct evidence for stress-induced (001) anisotropy of rapid-annealed FePt thin films10.1063/1.4730963 ↗
9. Substantial reduction in coercivity of perpendicular CoPt/FePt graded films with near-atomic flatness on glass substrates10.1016/j.jallcom.2015.01.076 ↗
10. L10 ordering of FePtB layers by oxidation-induced stress of capped layer10.1007/s00339-012-7512-3 ↗
11. Rapid thermal annealing of FePt thin films10.1002/pssa.201228718 ↗
12. L10 FePt thin films with [001] crystalline growth fabricated by SiO2 addition-rapid thermal annealing and dot pattering of the films10.1016/j.jmmm.2010.12.014 ↗
13. Fabrication of highly L10-ordered FePt thin films by low-temperature rapid thermal annealing10.1063/1.4821629 ↗
14. Prevention of dewetting during annealing of FePt films for bit patterned media applications10.1063/1.4748162 ↗
15. H.J. Lin, F.H. Chang, C.H. Lai, Highly (001)-oriented thin continuous L10 FePt film by introducing an FeOx cap layer10.1063/1.4793189 ↗
16. Residual stress measurement in textured thin film by grazing-incidence X-ray diffraction10.1016/S0040-6090(02)00680-6 ↗
17. Effect of initial stress/strain state on order-disorder transformation of FePt thin films10.1063/1.3153513 ↗
18. Warren · 1990
19. Surface roughening of heterepitaxial thin films10.1146/annurev.matsci.29.1.173 ↗
20. The mechanism of Ag top layer on the coercivity enhancement of FePt thin films10.1063/1.1854332 ↗
21. L10 ordering and microstructure of FePt thin films with Cu, Ag, and Au additive10.1063/1.1516870 ↗