Fabrication and performance of Fe-based magnetic thin film inductor for high-frequency application

Abstract This paper reports on a technological process that combines copper as conductor, a soft FeCuNbCrSiB magnetic thin film prepared by magnetron sputtering as magnetic core and Al 2 O 3 thin film as the insulation material to complete a solenoid-type inductor with high inductance and high-quality factor ( Q -factor). The shape of the magnetic core scheme is rectangular, and the size of the inductor is 4 mm×4 mm. The results show that the fabricated solenoid-type inductor has high inductance and high Q -factor in the frequency range of 1–10 MHz, the inductance is 1.45 μH at 1 MHz and the maximum quality factor is 1.65 at 7.5 MHz.