Design and fabrication of a magnetic microfluidic light modulator using magnetic fluid

Abstract A microfluidic MEMS-based light modulator using magnetic fluid was designed and fabricated. The surface reflectance of the device is modulated by driving magnetic fluid into and out from the cell face by magnetic force and surface tension force, respectively. Fluid actuation can be achieved using a moderate level of current below 100 mA, and no considerable thermal effects have been observed. The actuation of the liquid can be completed in a few milliseconds for both light-to-dark and dark-to-light switchings.