Crystal structure and magnetic properties of SmCo-based films deposited on hot Si (100) substrates

Abstract SmCo-based films were deposited on Si (1 0 0) substrates by the rf magnetron sputtering process. The growth conditions are improved for the films deposited on hot Si substrates without the annealing process. The dependence of crystal structure and intrinsic coercivity on substrate temperature is chiefly investigated. It is suggested that TbCu 7 type structural films can be obtained with enhanced in-plane magnetic properties with proper substrate temperature.