Electrical resistivity of Cu and Nb thin films and multilayers
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Abstract
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Research context
OpenAlex topics: Copper Interconnects and Reliability · Semiconductor materials and devices · Metal and Thin Film Mechanics
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References (6)
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2. Dimmich · J. Phys. F · 1985 · 15 · 247710.1088/0305-4608/15/12/010 ↗
3. Mayadas · Phys. Rev. B · 1970 · 1 · 138210.1103/PhysRevB.1.1382 ↗
4. Kaneko · J. Phys. F · 1988 · 18 · 205310.1088/0305-4608/18/9/022 ↗
5. Artunc · J. Phys.: Condens. Matter · 1993 · 5 · 55910.1088/0953-8984/5/5/007 ↗
6. Schep · J. Inglesfield, Phys. Rev. B · 1997 · 56 · 1080510.1103/PhysRevB.56.10805 ↗