Changes of chemical composition and structure of soft magnetic nanocrystalline Fe–Zr–N alloy under vacuum annealing

Abstract The amorphous soft magnetic alloys were produced by magnetron sputtering of Fe–8 at%Zr target in Ar and Ar+10%N2 atmospheres as films 1.5–2.5 μm thick. X-ray diffraction analysis showed that annealing of the films resulted in formation of BCC Fe-based phase and additionally Fe2Zr in the Fe–Zr films. Amorphous phase in the Fe–Zr–N films is more thermostable in comparison with that in the Fe–Zr ones. X-ray spectrum microanalysis showed that nitrogen content in the Fe–Zr–N films decreases significantly during vacuum annealing.