journal article·2002-02

Ion beam induced chemical vapor deposition (IBICVD) of cobalt particles

Adam Łapicki, Ehsan Ahmad, Takao Suzuki

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Abstract

Abstract A novel method aiming at fabricating submicron-scale particles utilizing dicobalt octacarbonyl as a precursor for cobalt, formed upon localized ion beam induced decomposition, is presented. Patterns of deposited particles are fabricated through vector scan rastering. Measurements of cumulative magnetic properties (arrays of 2 μm–size dots) show coercivity of about 100 Oe and the saturation magnetization of approximately 1000 emu/cm 3 .
Source: openaire · Quality: candidate unverified · Source record ↗

Research context

OpenAlex topics: Ion-surface interactions and analysis · Force Microscopy Techniques and Applications · Advanced Electron Microscopy Techniques and Applications

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