Applications of magmems

This paper will discuss the benefits accruing from the integration of magnetic films and structures into microelectromechanical systems (MEMS). These benefits include self-test, self-calibration and remote sensing and actuation. The magnetics principles behind these benefits will be outlined. These include magnetostrictive and ΔE effects, the latter being unique to magnetic materials. A review will be given of currently available magnetic films suitable for MagMEMS, and there will also be a discussion of future development requirements. A number of proof-of-concept MagMEMS will be reviewed in support of these advantages. These will include resonant structures and hearing implants. Future development must address CMOS compatibility, and this paper will consider issues and potential solutions in this area. This subject area is fortunate in being ready for rapid development on the back of silicon MEMS and the technologies developed in the data storage industry.